Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11764073 | Light irradiation type heat treatment method | Masashi Furukawa | 2023-09-19 |
| 11746410 | Heat treatment apparatus heating substrate | Yasuaki Kondo | 2023-09-05 |
| 11621178 | Light irradiation type heat treatment apparatus including oxygen analyzer and heat treatment method thereof | Takayuki Aoyama, Akitsugu Ueda, Kazunori AMAGO | 2023-04-04 |
| 11551946 | Light irradiation type heat treatment method and heat treatment apparatus | Yoshihide Nozaki, Yoshio Ito | 2023-01-10 |