Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11574824 | Heat treatment method including low temperature degassing before flash lamp anneal and heat treatment apparatus thereof | Takayuki Aoyama, Shinichi Kato, Kazuhiko Fuse, Hikaru Kawarazaki, Masashi Furukawa +1 more | 2023-02-07 |