Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11664191 | Electron beam irradiation apparatus and electron beam irradiation method | Kota Iwasaki | 2023-05-30 |
| 11621140 | Multiple electron beam writing apparatus and multiple electron beam writing method | Kota Iwasaki | 2023-04-04 |
| 11562878 | Method for controlling operation of electron emission source, electron beam writing method, and electron beam writing apparatus | Nobuo Miyamoto | 2023-01-24 |