Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11749491 | Electron beam writing apparatus and cathode life span prediction method | Satoshi Nakahashi, Takahito Nakayama, Shunji Shinkawa | 2023-09-05 |
| 11562878 | Method for controlling operation of electron emission source, electron beam writing method, and electron beam writing apparatus | Taku Yamada | 2023-01-24 |