Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11664191 | Electron beam irradiation apparatus and electron beam irradiation method | Taku Yamada | 2023-05-30 |
| 11621140 | Multiple electron beam writing apparatus and multiple electron beam writing method | Taku Yamada | 2023-04-04 |