Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11830758 | Plasma processing method | Atsushi Harikai, Akihiro Itou | 2023-11-28 |
| 11817323 | Etching method and element chip manufacturing method | Atsushi Harikai, Akihiro Itou | 2023-11-14 |
| 11688641 | Element chip isolation method using laser grooving and plasma etching | Hidefumi SAEKI, Hidehiko Karasaki, Atsushi Harikai, Akihiro Itou | 2023-06-27 |
| 11682575 | Plasma processing apparatus, plasma processing method, and element chip manufacturing method | Atsushi Harikai | 2023-06-20 |
| 11551974 | Manufacturing process of element chip using laser grooving and plasma-etching | Hidefumi SAEKI, Atsushi Harikai | 2023-01-10 |