Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11830758 | Plasma processing method | Atsushi Harikai, Shogo Okita | 2023-11-28 |
| 11817323 | Etching method and element chip manufacturing method | Shogo Okita, Atsushi Harikai | 2023-11-14 |
| 11688641 | Element chip isolation method using laser grooving and plasma etching | Hidefumi SAEKI, Hidehiko Karasaki, Shogo Okita, Atsushi Harikai | 2023-06-27 |