Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11688641 | Element chip isolation method using laser grooving and plasma etching | Hidehiko Karasaki, Shogo Okita, Atsushi Harikai, Akihiro Itou | 2023-06-27 |
| 11551974 | Manufacturing process of element chip using laser grooving and plasma-etching | Atsushi Harikai, Shogo Okita | 2023-01-10 |