Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11804361 | Charged particle beam writing method, charged particle beam writing apparatus, and computer-readable recording medium | Haruyuki NOMURA, Munehiro Ogasawara | 2023-10-31 |
| 11789372 | Writing data generating method and multi charged particle beam writing apparatus | Kenichi Yasui | 2023-10-17 |
| 11774860 | Writing data generating method, multi charged particle beam writing apparatus, pattern inspecting apparatus, and computer-readable recording medium | Kenichi Yasui | 2023-10-03 |