Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11789372 | Writing data generating method and multi charged particle beam writing apparatus | Noriaki Nakayamada | 2023-10-17 |
| 11774860 | Writing data generating method, multi charged particle beam writing apparatus, pattern inspecting apparatus, and computer-readable recording medium | Noriaki Nakayamada | 2023-10-03 |
| 11749499 | Data generation method and charged particle beam irradiation device | — | 2023-09-05 |