Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11804361 | Charged particle beam writing method, charged particle beam writing apparatus, and computer-readable recording medium | Haruyuki NOMURA, Noriaki Nakayamada | 2023-10-31 |
| 11694868 | Multi-beam image acquisition apparatus and multi-beam image acquisition method | Kazuhiko Inoue, Atsushi Ando | 2023-07-04 |
| 11605523 | Aberration corrector and multiple electron beam irradiation apparatus | Kazuhiko Inoue | 2023-03-14 |