Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11804360 | Multi charged particle beam adjustment method, multi charged particle beam irradiation method, and multi charged particle beam irradiation apparatus | Tsubasa NANAO, Takanao Touya | 2023-10-31 |
| 11784335 | Hydrogen-energy control system and control method for hydrogen-energy control system | Takashi Akiba, Fumiyuki YAMANE, Shin Kato, Tetsuharu Tanoue | 2023-10-10 |
| 11756766 | Charged particle beam writing apparatus and charged particle beam writing method | Takahito Nakayama | 2023-09-12 |
| 11721520 | Semiconductor device, multi-charged-particle beam writing apparatus, and multi-charged-particle beam exposure apparatus | Kei OBARA, Kazuyuki Higashi, Miyoko Shimada, Yoshiaki Shimooka, Hitomi Yamaguchi +2 more | 2023-08-08 |
| 11710839 | Controller, controlling method, and record medium | Masahiko Murai, Shingo Tamaru, Takashi Akiba, Fumiyuki YAMANE, Shin Kato +1 more | 2023-07-25 |