Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11721520 | Semiconductor device, multi-charged-particle beam writing apparatus, and multi-charged-particle beam exposure apparatus | Kei OBARA, Kazuyuki Higashi, Miyoko Shimada, Hitomi Yamaguchi, Yoshikuni GOSHIMA +2 more | 2023-08-08 |