Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11804360 | Multi charged particle beam adjustment method, multi charged particle beam irradiation method, and multi charged particle beam irradiation apparatus | Hirofumi Morita, Takanao Touya | 2023-10-31 |
| 11740546 | Multi charged particle beam writing apparatus and method of adjusting same | Hiroshi Matsumoto | 2023-08-29 |