Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11852985 | Imprint method, imprint apparatus, and film formation apparatus | Anupam Mitra, Takahiro Iwasaki | 2023-12-26 |
| 11769667 | Template, method for producing template, and method for producing semiconductor device | — | 2023-09-26 |
| 11666228 | Measuring apparatus, measuring method, and program | Asao HIRANO, Tomoyuki TOUGASAKI | 2023-06-06 |
| 11592741 | Imprinting method, semiconductor device manufacturing method and imprinting apparatus | Hirokazu Kato, Kasumi OKABE | 2023-02-28 |