Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11835854 | Imprint device, imprint method, and semiconductor device manufacturing method | Hirokazu Kato, Kei Kobayashi, Daizo Muto | 2023-12-05 |
| 11592741 | Imprinting method, semiconductor device manufacturing method and imprinting apparatus | Takeshi Higuchi, Hirokazu Kato | 2023-02-28 |