Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11852985 | Imprint method, imprint apparatus, and film formation apparatus | Takeshi Higuchi, Takahiro Iwasaki | 2023-12-26 |
| 11762285 | Template, patterning method, and method for manufacturing semiconductor device | Masaki Mitsuyasu, Kazuya Fukuhara, Kazuhiro Takahata, Sachiko Kobayashi | 2023-09-19 |
| 11669011 | Template, template manufacturing method, and semiconductor device manufacturing method | Jun Watanabe, Kazuya Fukuhara | 2023-06-06 |