Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837469 | Imprint apparatus, imprint method, and method of manufacturing semiconductor device | Tetsuro Nakasugi, Masayuki Hatano | 2023-12-05 |
| 11762285 | Template, patterning method, and method for manufacturing semiconductor device | Anupam Mitra, Masaki Mitsuyasu, Kazuhiro Takahata, Sachiko Kobayashi | 2023-09-19 |
| 11669011 | Template, template manufacturing method, and semiconductor device manufacturing method | Jun Watanabe, Anupam Mitra | 2023-06-06 |