Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11827976 | Systems and methods for homogenous intermixing of precursors in alloy atomic layer deposition | Ilanit Fisher, Michal Danek, Patrick A. Van Cleemput, Shruti Vivek Thombare | 2023-11-28 |
| 11670516 | Metal-containing passivation for high aspect ratio etch | Karthik S. Colinjivadi, Samantha Tan, Shih-Ked Lee, George Matamis, Yongsik Yu +4 more | 2023-06-06 |