Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11827976 | Systems and methods for homogenous intermixing of precursors in alloy atomic layer deposition | Ilanit Fisher, Raashina Humayun, Michal Danek, Shruti Vivek Thombare | 2023-11-28 |
| 11784047 | Tin oxide thin film spacers in semiconductor device manufacturing | David Charles Smith, Richard Wise, Arpan Mahorowala, Bart J. van Schravendijk | 2023-10-10 |
| 11670516 | Metal-containing passivation for high aspect ratio etch | Karthik S. Colinjivadi, Samantha Tan, Shih-Ked Lee, George Matamis, Yongsik Yu +4 more | 2023-06-06 |
| 11637037 | Method to create air gaps | Seshasayee Varadarajan, Bart J. van Schravendijk | 2023-04-25 |