Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11646226 | Method of tuning film properties of metal nitride using plasma | Wenyi Liu, Wei V. Tang, Srinivas Gandikota, Yixiong Yang, Yong Wu +2 more | 2023-05-09 |
| 11581213 | Susceptor wafer chucks for bowed wafers | Abhishek Chowdhury, Vijayabhaskara Venkatagiriyappa, Mihaela Balseanu, Jyoti Prakash Deo, Srinivas Ramakrishna +4 more | 2023-02-14 |
| 11552177 | PMOS high-K metal gates | Srinivas Gandikota, Steven C. H. Hung, Jacqueline S. Wrench, Yixiong Yang, Yong Yang | 2023-01-10 |