Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11688590 | Electrostatic-chuck heater | Reo WATANABE | 2023-06-27 |
| 11664203 | Electrostatic-chuck heater | Reo WATANABE | 2023-05-30 |
| 11602012 | Wafer placement table and method for manufacturing the same | Shuichiro Motoyama | 2023-03-07 |
| 11574822 | Wafer support table with ceramic substrate including core and surface layer | Shuichiro Motoyama | 2023-02-07 |