Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11688590 | Electrostatic-chuck heater | Yutaka Unno | 2023-06-27 |
| 11664203 | Electrostatic-chuck heater | Yutaka Unno | 2023-05-30 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11688590 | Electrostatic-chuck heater | Yutaka Unno | 2023-06-27 |
| 11664203 | Electrostatic-chuck heater | Yutaka Unno | 2023-05-30 |