Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11602012 | Wafer placement table and method for manufacturing the same | Yutaka Unno | 2023-03-07 |
| 11574822 | Wafer support table with ceramic substrate including core and surface layer | Yutaka Unno | 2023-02-07 |