Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837490 | Electrostatic chuck heater | Yuji AKATSUKA, Hiroshi Takebayashi, Takahiro Ando | 2023-12-05 |
| 11610798 | Electrostatic chuck assembly, electrostatic chuck, and focus ring | Tatsuya KUNO, Ikuhisa Morioka | 2023-03-21 |