Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837490 | Electrostatic chuck heater | Kenichiro AIKAWA, Hiroshi Takebayashi, Takahiro Ando | 2023-12-05 |
| 11715652 | Member for semiconductor manufacturing apparatus | Masaki Ishikawa | 2023-08-01 |