Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11610798 | Electrostatic chuck assembly, electrostatic chuck, and focus ring | Ikuhisa Morioka, Kenichiro AIKAWA | 2023-03-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11610798 | Electrostatic chuck assembly, electrostatic chuck, and focus ring | Ikuhisa Morioka, Kenichiro AIKAWA | 2023-03-21 |