Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837495 | Carrier ring designs for controlling deposition on wafer bevel/edge | Brian Joseph Williams | 2023-12-05 |
| 11830759 | Carrier ring designs for controlling deposition on wafer bevel/edge | Brian Joseph Williams | 2023-11-28 |
| 11619925 | Remote-plasma clean (RPC) directional-flow device | James Lee | 2023-04-04 |