Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11619925 | Remote-plasma clean (RPC) directional-flow device | Michael J. Janicki | 2023-04-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11619925 | Remote-plasma clean (RPC) directional-flow device | Michael J. Janicki | 2023-04-04 |