Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837495 | Carrier ring designs for controlling deposition on wafer bevel/edge | Michael J. Janicki | 2023-12-05 |
| 11830759 | Carrier ring designs for controlling deposition on wafer bevel/edge | Michael J. Janicki | 2023-11-28 |