Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11764086 | Wafer transport assembly with integrated buffers | David Trussell, Christopher Pena, Michael C. Kellogg, Klay Kunkel, Richard H. Gould | 2023-09-19 |
| 11710623 | Vacuum pump protection against deposition byproduct buildup | John Drewery, Tom A. Kamp, Haoquan Yan, Ali Sucipto Tan, Ming-Kuei Tseng +1 more | 2023-07-25 |
| 11662237 | MEMS coriolis gas flow controller | Iqbal Shareef, Dennis R. Smith | 2023-05-30 |