Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11851322 | Microelectromechanical system (MEMS) sensor packages and methods for producing microelectromechanical system sensor packages having a plurality of MEMS sensor chips | Rainer Markus Schaller | 2023-12-26 |
| 11835600 | Current sensor | Rainer Markus Schaller, Volker Strutz | 2023-12-05 |
| 11573204 | Photoacoustic sensors and MEMS devices | Rainer Markus Schaller, Matthias Eberl, Simon Gassner, Franz Jost, Stefan Kolb +1 more | 2023-02-07 |