Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11710623 | Vacuum pump protection against deposition byproduct buildup | John Drewery, Tom A. Kamp, John Daugherty, Ali Sucipto Tan, Ming-Kuei Tseng +1 more | 2023-07-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11710623 | Vacuum pump protection against deposition byproduct buildup | John Drewery, Tom A. Kamp, John Daugherty, Ali Sucipto Tan, Ming-Kuei Tseng +1 more | 2023-07-25 |