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Haoquan Yan

Lam Research: 1 patents #79 of 269Top 30%
Overall (2023): #428,582 of 537,848Top 80%
1
Patents 2023

Issued Patents 2023

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11710623 Vacuum pump protection against deposition byproduct buildup John Drewery, Tom A. Kamp, John Daugherty, Ali Sucipto Tan, Ming-Kuei Tseng +1 more 2023-07-25