Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11820654 | Si-containing film forming precursors and methods of using the same | Peng Zhang, Antonio Sanchez, Manish Khandelwal, Gennadiy Itov, Reno Pesaresi +2 more | 2023-11-21 |
| 11821080 | Reagents to remove oxygen from metal oxyhalide precursors in thin film deposition processes | Yumin Liu, Rocio Alejandra Arteaga Muller, Nicolas Blasco, Feng Li, Venkateswara R. Pallem +1 more | 2023-11-21 |
| 11806677 | Preprocessing method for solid material, and solid material product filled with solid material manufactured using said solid material preprocessing method | Kohei Tarutani, Nicolas Blasco, Stefan Wiese, Guillaume Husson | 2023-11-07 |
| 11739220 | Perhydropolysilazane compositions and methods for forming oxide films using same | Antonio Sanchez, Gennadiy Itov, Manish Khandelwal, Cole J. Ritter, III, Peng Zhang +9 more | 2023-08-29 |
| 11699584 | Si-containing film forming precursors and methods of using the same | Peng Zhang, Antonio Sanchez, Manish Khandelwal, Gennadiy Itov, Reno Pesaresi | 2023-07-11 |
| 11577967 | Tungsten pentachloride conditioning and crystalline phase manipulation | Feng Li, Sonia Plaza, Nicolas Blasco, Yumin Liu | 2023-02-14 |