Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837474 | Method to improve profile control during selective etching of silicon nitride spacers | Xiangyu Guo, James Royer, Nathan Stafford | 2023-12-05 |
| 11821080 | Reagents to remove oxygen from metal oxyhalide precursors in thin film deposition processes | Yumin Liu, Rocio Alejandra Arteaga Muller, Nicolas Blasco, Jean-Marc Girard, Feng Li +1 more | 2023-11-21 |
| 11784041 | Preparation of lanthanide-containing precursors and deposition of lanthanide-containing films | Daehyeon Kim, Junhyun Song, Wontae Noh | 2023-10-10 |