Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837474 | Method to improve profile control during selective etching of silicon nitride spacers | Xiangyu Guo, James Royer, Venkateswara R. Pallem | 2023-12-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837474 | Method to improve profile control during selective etching of silicon nitride spacers | Xiangyu Guo, James Royer, Venkateswara R. Pallem | 2023-12-05 |