Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11820654 | Si-containing film forming precursors and methods of using the same | Jean-Marc Girard, Peng Zhang, Antonio Sanchez, Manish Khandelwal, Gennadiy Itov +2 more | 2023-11-21 |
| 11739220 | Perhydropolysilazane compositions and methods for forming oxide films using same | Antonio Sanchez, Gennadiy Itov, Manish Khandelwal, Cole J. Ritter, III, Peng Zhang +9 more | 2023-08-29 |
| 11699584 | Si-containing film forming precursors and methods of using the same | Jean-Marc Girard, Peng Zhang, Antonio Sanchez, Manish Khandelwal, Gennadiy Itov | 2023-07-11 |