Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11850744 | Travel robot for moving substrate transfer robot in chamber | Eun Jae Choi, Hyeon Ju Kim, Jun Young Kim | 2023-12-26 |
| 11820005 | Substrate transfer robot for transferring substrate in vacuum chamber | Myung Jin Kim, Chang Seong Lee, Seung Young Baek, Chang Hyun Jee, Sang Hwi Ham +3 more | 2023-11-21 |