Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11850744 | Travel robot for moving substrate transfer robot in chamber | Soo Jong Lee, Hyeon Ju Kim, Jun Young Kim | 2023-12-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11850744 | Travel robot for moving substrate transfer robot in chamber | Soo Jong Lee, Hyeon Ju Kim, Jun Young Kim | 2023-12-26 |