Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11820005 | Substrate transfer robot for transferring substrate in vacuum chamber | Soo Jong Lee, Myung Jin Kim, Seung Young Baek, Chang Hyun Jee, Sang Hwi Ham +3 more | 2023-11-21 |