Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823886 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus, and recording medium | Kazuhiro Harada, Shintaro Kogura, Shogo Otani, Yoshitomo HASHIMOTO | 2023-11-21 |
| 11728159 | Method of manufacturing semiconductor device, surface treatment method, substrate processing apparatus, and recording medium | Kazuhiro Harada, Akihito Yoshino, Masaya NISHIDA, Naoko Kitagawa, Shintaro Kogura +1 more | 2023-08-15 |
| 11618947 | Method of cleaning, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kazuhiro Harada, Shingo NOHARA, Yuji Urano, Yasunobu Koshi | 2023-04-04 |