Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11728159 | Method of manufacturing semiconductor device, surface treatment method, substrate processing apparatus, and recording medium | Kazuhiro Harada, Masayoshi Minami, Masaya NISHIDA, Naoko Kitagawa, Shintaro Kogura +1 more | 2023-08-15 |