Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11635700 | Method and apparatus for EUV mask inspection | Erel Milshtein, Alexander N. Bykanov, Konstantin Tsigutkin, Lauren Wilson, Lubomyr Kucher +4 more | 2023-04-25 |
| 11596048 | Rotating lamp for laser-sustained plasma illumination source | Ilya Bezel, Leonid Borisovich Zvedenuk, Andrey Evgenievich Stepanov, Boris Vasilyevich Potapkin | 2023-02-28 |