Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11635700 | Method and apparatus for EUV mask inspection | Erel Milshtein, Alexander N. Bykanov, Konstantin Tsigutkin, Lubomyr Kucher, Brian Ahr +4 more | 2023-04-25 |
| 11617256 | Laser and drum control for continuous generation of broadband light | Jian Xu | 2023-03-28 |