Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776804 | Laser-sustained plasma light source with reverse vortex flow | Ilya Bezel, Leonid Borisovich Zvedenuk, Vitaly K. Rerikh, Boris Vasilyevich Potapkin | 2023-10-03 |
| 11690162 | Laser-sustained plasma light source with gas vortex flow | Ilya Bezel, Leonid Borisovich Zvedenuk, Yuriy Gennadievich Kutsenko, Boris Vasilyevich Potapkin, Sumeet Kumar | 2023-06-27 |
| 11635700 | Method and apparatus for EUV mask inspection | Erel Milshtein, Alexander N. Bykanov, Konstantin Tsigutkin, Lauren Wilson, Lubomyr Kucher +4 more | 2023-04-25 |
| 11596048 | Rotating lamp for laser-sustained plasma illumination source | Ilya Bezel, Leonid Borisovich Zvedenuk, Maksim Alexandrovich Deminskii, Boris Vasilyevich Potapkin | 2023-02-28 |