Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11796910 | Template, manufacturing method of template | Shingo Kanamitsu, Noriko SAKURAI | 2023-10-24 |
| 11776823 | Substrate processing method and substrate processing apparatus | Mana TANABE, Kenji Masui, Kaori Umezawa | 2023-10-03 |
| 11682566 | Processing apparatus for processing substrates of different types | Mana TANABE, Hideaki Sakurai | 2023-06-20 |
| 11579537 | Pattern inspection method and photomask fabrication method | Keiko Morishita | 2023-02-14 |