Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776823 | Substrate processing method and substrate processing apparatus | Kosuke TAKAI, Kenji Masui, Kaori Umezawa | 2023-10-03 |
| 11682566 | Processing apparatus for processing substrates of different types | Kosuke TAKAI, Hideaki Sakurai | 2023-06-20 |