Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11796910 | Template, manufacturing method of template | Kosuke TAKAI, Shingo Kanamitsu | 2023-10-24 |
| 11789365 | Substrate processing method and substrate processing apparatus | Ryu Komatsu, Takeharu MOTOKAWA, Hideaki Sakurai | 2023-10-17 |