Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11814561 | Dry etching gas composition comprising sulfur-containing fluorocarbon compound having unsaturated bond and dry etching method using the same | Hisashi Shimizu | 2023-11-14 |
| 11814726 | Dry etching method or dry cleaning method | Yoshinao Takahashi, Katsuya Fukae | 2023-11-14 |
| 11795396 | Dry etching gas composition comprising sulfur-containing fluorocarbon compound having unsaturated bond and dry etching method using the same | Hisashi Shimizu | 2023-10-24 |
| 11795397 | Dry etching gas composition comprising sulfur-containing fluorocarbon compound and dry etching method using the same | Hisashi Shimizu | 2023-10-24 |
| 11584989 | Dry etching method or dry cleaning method | Yoshinao Takahashi, Katsuya Fukae | 2023-02-21 |