Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11814561 | Dry etching gas composition comprising sulfur-containing fluorocarbon compound having unsaturated bond and dry etching method using the same | Korehito KATO | 2023-11-14 |
| 11795396 | Dry etching gas composition comprising sulfur-containing fluorocarbon compound having unsaturated bond and dry etching method using the same | Korehito KATO | 2023-10-24 |
| 11795397 | Dry etching gas composition comprising sulfur-containing fluorocarbon compound and dry etching method using the same | Korehito KATO | 2023-10-24 |